Photoetched ultrasound transducer components

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices

Reexamination Certificate

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Details

C600S459000

Reexamination Certificate

active

07545079

ABSTRACT:
A photoetchable glass ceramic is used to form a three dimensional structure for a transducer component. This photostructurable material allows generation of various shapes or structures. For example, a matching layer is formed, in part, using photoetchable glass ceramics with an anechoic-shaped gradient structure. The gradient structures are then filled with materials having desired impedance properties. By allowing generation of desired structures within the matching layer, a desired acoustic impedance property may be provided. As another example, a hollow column is photo etched and used for providing air backing in a backing layer. As yet another example, a transducer layer is formed within a framework of photostructurable material. A plurality of holes with associated shelves is provided for pick-and-place locating of transducer elements within an array. The photostructurable material assists in manufacturing.

REFERENCES:
patent: 5742314 (1998-04-01), Hayes
patent: 6025048 (2000-02-01), Cutler et al.
patent: 6330831 (2001-12-01), Lynnworth et al.
patent: 6571444 (2003-06-01), Mauchamp et al.
patent: 2002/0165451 (2002-11-01), Phelps et al.
“A New 3D, Direct-Write, Sub-Micron Microfabrication Process that Achieves True Optical, Mechatronic and Packaging Integration on Glass-Ceramic Substrates,” by Raymond Karam and Richard J. Casler; Invenios, Incorporated; dated Apr. 1, 2003; 8pgs.

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