Piano MEMS with hidden hinge

Details Piano MEMS with hidden hinge Piano MEMS with hidden hinge

2007-04-04

2009-11-10

Dang, Hung X (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S290000, C359S292000, C310S309000

Reexamination Certificate

active

07616372

ABSTRACT:
The micro-electro-mechanical mirror device according to the present invention includes a platform pivotable about two perpendicular axes, and a hinge structure disposed beneath the platform. The hinge structure includes first and second hinges and a gimbal ring fabricated in a single layer beneath the platform layer. One end of the hinge structure extends from the undersurface of the platform, while the other end extends from a pedestal, which extends upwardly from a substrate.

REFERENCES:
patent: 6028689 (2000-02-01), Michalicek et al.
patent: 6327855 (2001-12-01), Hill et al.
patent: 6454421 (2002-09-01), Yu et al.
patent: 6491404 (2002-12-01), Hill
patent: 6529652 (2003-03-01), Brener
patent: 6533947 (2003-03-01), Nasiri et al.
patent: 6535319 (2003-03-01), Buzzetta et al.
patent: 6677695 (2004-01-01), Dhuler et al.
patent: 6856437 (2005-02-01), Witt et al.
patent: 6912078 (2005-06-01), Kudrle et al.
patent: 6968101 (2005-11-01), Miller et al.
patent: 7010188 (2006-03-01), Miller et al.
patent: 2002/0126455 (2002-09-01), Wood

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