Micro ion pump

Details Micro ion pump Micro ion pump

2004-01-27

2009-02-24

Kramer, Devon (Department: 3746)

Pumps

Electrical or getter type

C417S050000, C417S049000

Reexamination Certificate

active

07494326

ABSTRACT:
An ion pump having conductive electrodes on both sides of an insulator which may form a number of channels. These electrodes may provide electrical discharges which have a corona or cold cathode emission for ionization. The electrodes and the insulator may be layers having openings that form the channels. The openings in one electrode layer may have a sharp-like configuration and the openings in the other electrode layer may have a non-sharp-like configuration. Ions may be predominately in-situ generated proximate to the sharp-like openings and have the polarity of these openings. These ions may induce a fluid flow through the channels of neutral molecules as a result of a force and viscous drag of the ions. The sharp-like openings may have nanotube whiskers or a thin film structure for facilitating an electrical discharge.

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