Magneto-optical device and manufacturing method thereof

Optical: systems and elements – Optical modulator – Light wave temporal modulation

Reexamination Certificate

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C359S280000

Reexamination Certificate

active

07551343

ABSTRACT:
A magneto-optical device is provided with a non-magnetic substrate, a magneto-optical crystal embedded in recessed portions formed in the surface of the non-magnetic substrate at positions where pixels are to be located, and a partitioning wall monolithic with the non-magnetic substrate and magnetically separating the magneto-optical crystal from each other at the position of a gap between the pixels, wherein the entire surface of the magneto-optical device is flattened. A method for manufacturing a magneto-optical device includes a digging down step, executed at positions where pixels are to be located, of digging down into the surface of a non-magnetic substrate in advance at the positions where the pixels are to be formed, so that a gap portion located between the pixels and around the dug areas remains to form a partitioning wall, a magnetic film forming step of forming a film made of a magneto-optical crystal over substantially the entire surface of the non-magnetic substrate, and a surface flattening step of performing flattening by removing a protruded portion formed by the magnetic film that has grown on the gap portion.

REFERENCES:
patent: 5473466 (1995-12-01), Tanielian et al.
patent: 2003-315756 (2003-11-01), None
patent: 2004-294579 (2004-10-01), None
patent: 2005-221841 (2005-08-01), None

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