Fluid handling – Line condition change responsive valves – Pilot or servo controlled
Reexamination Certificate
2006-02-23
2009-11-10
Lee, Kevin L (Department: 3753)
Fluid handling
Line condition change responsive valves
Pilot or servo controlled
C137S240000, C137S486000, C137S551000, C134S095100, C134S098100, C134S171000, C222S148000
Reexamination Certificate
active
07614421
ABSTRACT:
Apparatus and method for dispensing a gas using a gas source coupled in selective flow relationship with a gas manifold. The gas manifold includes flow circuitry for discharging gas to a gas-using zone, and the gas source includes a pressure-regulated gas source vessel containing the gas at superatmospheric pressure. The pressure-regulated gas source vessel can be arranged with a pressure regulator at or within the vessel and a flow control valve coupled in flow relationship to the vessel, so that gas dispensed from the vessel flows through the regulator prior to flow through the flow control valve, and into the gas manifold. The apparatus and method permit an enhancement of the safety of storage and dispensing of toxic or otherwise hazardous gases used in semiconductor processes.
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Donatucci Matthew B.
Olander W. Karl
Wang Luping
Wodjenski Michael J.
Advanced Technology & Materials Inc.
Hultquist Steven J.
Intellectual Property / Technology Law
Lee Kevin L
Lin Chih Sheng
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