Slot waveguide structure

Details Slot waveguide structure Slot waveguide structure

2006-07-06

2009-10-27

Healy, Brian M (Department: 2883)

Optical waveguides

Planar optical waveguide

Thin film optical waveguide

C385S129000, C385S130000, C385S131000, C385S141000, C385S012000, C385S001000, C385S014000, C438S031000

Reexamination Certificate

active

07609932

ABSTRACT:
A nanometer slot waveguide includes a nanometer slot waveguide structure with vertically stacked layers. The vertically stacked layers include a substrate, a first waveguide layer defining a first rail, a spacer layer defining a slot, and a second waveguide layer defining a second rail.

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