Method for manufacturing conductive element substrate,...

Stock material or miscellaneous articles – Liquid crystal optical display having layer of specified... – With charge transferring layer of specified composition

Reexamination Certificate

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C428S001510, C216S095000, C438S749000, C438S978000, C349S139000

Reexamination Certificate

active

07550183

ABSTRACT:
A method for manufacturing a liquid crystal display which employs an active matrix substrate including a plurality of pixels arranged in matrix on a substrate and reflecting electrodes formed in the pixels, respectively. The method comprises (a) a laminated conductive film formation step of sequentially forming a conductive metal film and an amorphous transparent conductive film on a substrate to form a laminated conductive film and (b) a reflecting electrode formation step of patterning the laminated conductive film into a reflecting electrode, wherein the step (b) includes a first etching step of etching the conductive metal film and the amorphous transparent conductive film simultaneously and a second etching step of etching the amorphous transparent conductive film only.

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