Method and apparatus for optically controlling the quality...

Details Method and apparatus for optically controlling the quality... Method and apparatus for optically controlling the quality...

2005-11-16

2009-08-18

Pham, Hoa Q (Department: 2886)

Optics: measuring and testing

Inspection of flaws or impurities

Reexamination Certificate

active

07576849

ABSTRACT:
Method and apparatus for optically testing the quality of objects such as silicon wafers which have a circular peripheral edge, wherein light is directed onto the edge region of the object, and the light radiating from the object due to reflection, refraction and/or diffraction is detected by means of a measuring unit which produces an image from the received light. Defects on and/or in the object are identified from the produced image.

REFERENCES:
patent: 4328553 (1982-05-01), Fredriksen et al.
patent: 6038029 (2000-03-01), Finarov
patent: 6147357 (2000-11-01), Nicolesco
patent: 6249342 (2001-06-01), Cheng
patent: 6297879 (2001-10-01), Yang et al.
patent: 6324298 (2001-11-01), O'Dell et al.
patent: 6489626 (2002-12-01), Van der Muehlen et al.
patent: 6501546 (2002-12-01), Weiss
patent: 6541747 (2003-04-01), Kikuchi et al.
patent: 6545752 (2003-04-01), Swan et al.
patent: 6906794 (2005-06-01), Tsuji
patent: 6947588 (2005-09-01), Sim
patent: 7079237 (2006-07-01), Woo et al.
patent: 7102743 (2006-09-01), Tsuji et al.
patent: 7149341 (2006-12-01), Hayashi et al.
patent: 2002/0001403 (2002-01-01), Kikuchi
patent: 2002/0131166 (2002-09-01), Woo et al.
patent: 2002/0168787 (2002-11-01), Noguchi et al.
patent: 2003/0053046 (2003-03-01), Ise et al.
patent: 2003/0202178 (2003-10-01), Tsuji et al.
patent: 2005/0036671 (2005-02-01), Watkins et al.
patent: 101 31 665 (2003-01-01), None
patent: 0 100 446 (1984-02-01), None
patent: 0 499 312 (1992-08-01), None
patent: 0 766 298 (1997-04-01), None
patent: 1 001 460 (2000-05-01), None
patent: 406258231 (1994-09-01), None
patent: 2000 046743 (2000-02-01), None
patent: 200046537 (2000-02-01), None
patent: WO 98/59235 (1998-12-01), None
patent: WO 99/67626 (1999-12-01), None
patent: WO 02/35217 (2002-05-01), None

Affiliated with

Also associated with

Rating

Method and apparatus for optically controlling the quality... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and apparatus for optically controlling the quality..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for optically controlling the quality... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4072956