Thin-film magnetic head structure, method of manufacturing...

Dynamic magnetic information storage or retrieval – Head – Magnetoresistive reproducing head

Reexamination Certificate

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Reexamination Certificate

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07492555

ABSTRACT:
A method of manufacturing a thin-film magnetic head structure comprises the steps of preparing an insulating layer10; forming a first resist layer51provided with a first slit pattern51acorresponding to a very narrow groove part and a second slit pattern51bcorresponding to a temporary groove part integrally extending from the very narrow groove part along outer edges of a main depression onto the insulating layer10; etching the insulating layer10while using the first resist layer51as a mask; eliminating the first resist layer51; forming a second resist layer having an opening pattern corresponding to the main depression onto the insulating layer10; and etching the insulating layer10while using the second resist layer as a mask.

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patent: A 2003-203311 (2003-07-01), None
patent: A 2003-242607 (2003-08-01), None
patent: A 2004-094997 (2004-03-01), None
U.S. Appl. No. 11/073,225 to Sasaki et al.Magnetic Head for Perpendicular Magnetic Recording and Method of Manufacturing the Same. Mar. 7, 2005.

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