Composite stamper for imprint lithography

Plastic article or earthenware shaping or treating: apparatus – Preform reshaping or resizing means: or vulcanizing means... – Surface deformation means only

Reexamination Certificate

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C264S296000, C425S125000

Reexamination Certificate

active

07632087

ABSTRACT:
A stamper having a patterned layer composed of a hard material and a compressible material back plane layer. The back plane layer may be composed of an elastomer. The stamper may be used to imprint an embossable layer disposed above a substrate for the production of a magnetic recording disk.

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