Infrared radiation imaging array with compound sensors forming e

Details Infrared radiation imaging array with compound sensors forming e Infrared radiation imaging array with compound sensors forming e

1993-11-17

1995-09-12

Hannaher, Constantine

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

2503384, G01J 514

Patent

active

054499100

ABSTRACT:
An infrared imaging array of thermoelectric sensors has a plurality of electrically connected microbridge subsensors comprising each sensor of the array. Each subsensor consists of a short span microbridge lying across a relatively small pit. The use of many of such subsensors for each sensor rather than a single large area microbridge sensor for a single pixel allows each pixel to be made large enough to give good sensitivity in either vacuum or gas-filled designs, and at the same time avoid the reduced fabrication yield which results when sensors span large pits.

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