Plasma generating electrode, plasma generation device, and...

Details Plasma generating electrode, plasma generation device, and... Plasma generating electrode, plasma generation device, and...

2004-06-18

2009-12-22

Paschall, Mark H (Department: 3742)

Electric heating

Metal heating

By arc

C315S111510

Reexamination Certificate

active

07635824

ABSTRACT:
A plasma generating electrode of the invention present includes at least a pair of electrodes5,at least one electrode5aof the pair of electrodes5including a plate-like ceramic body2as a dielectric and a conductive film3disposed inside the ceramic plate2and having a plurality of through-holes4formed through the conductive film3in its thickness direction, the through-holes having a cross-sectional shape including an arc shape along a plane perpendicular to the thickness direction. The plasma generating electrode can generate uniform and stable plasma at low power consumption.

REFERENCES:
patent: A 8-49525 (1996-02-01), None
patent: A 9-245993 (1997-09-01), None
patent: A 2001-164925 (2001-06-01), None
patent: A 2001-274103 (2001-10-01), None
patent: A-2002-129947 (2002-05-01), None

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