Lithographic apparatus and device manufacturing method...

Details Lithographic apparatus and device manufacturing method... Lithographic apparatus and device manufacturing method...

2005-12-22

2009-02-17

Mathews, Alan A (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S030000, C355S072000

Reexamination Certificate

active

07492441

ABSTRACT:
A lithographic apparatus is disclosed that has a movable article support configured to hold and move an article, a radiation control system configured to control a beam of radiation to be targeted onto the article, the article support, or both, the article to be moved relatively to the radiation control system by the movable article support for measurement, exposure, or both purposes, and a pressure shield that is mechanically uncoupled from the radiation control system to shield against pressure waves induced by the article support so as to help prevent displacement of the radiation control system caused by the pressure waves.

REFERENCES:
patent: 6757048 (2004-06-01), Arakawa
patent: 7098991 (2006-08-01), Nagasaka et al.
patent: 2005/0018160 (2005-01-01), Dams et al.

Affiliated with

Also associated with

Rating

Lithographic apparatus and device manufacturing method... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Lithographic apparatus and device manufacturing method..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Lithographic apparatus and device manufacturing method... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4071529