Measuring and testing – Volume or rate of flow – Thermal type
Reexamination Certificate
2007-06-20
2009-11-17
Patel, Harshad (Department: 2855)
Measuring and testing
Volume or rate of flow
Thermal type
Reexamination Certificate
active
07617723
ABSTRACT:
The coupling capacitance of the wiring portions of a thermal type flow rate measuring apparatus is reduced so as to prevent a drop in the response characteristics. A detection element of the thermal type flow rate measuring apparatus includes a planar substrate made of silicon, ceramic, or the like, in which a diaphragm is formed. On the surface of the diaphragm, there are disposed a heat-generating resistor as a heat-generating element that is heated to a predetermined temperature difference from the temperature of air flow to be measured, a heat-generating element temperature-detecting resistor for detecting the temperature of the heat-generating resistor, and temperature-detecting resistors disposed on both sides of the heat-generating resistor. The detection element also includes wiring portions which have connecting terminals electrically connected to the heat-generating resistor and a wiring pattern electrically connected with the surface of the planar substrate.
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Hanzawa Keiji
Kanamaru Yasuhiro
Matsumoto Masahiro
Nakano Hiroshi
Yamada Masamichi
Hitachi , Ltd.
Mattingly & Malur, PC
Patel Harshad
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