Piezoelectric resonator having improved temperature...

Details Piezoelectric resonator having improved temperature... Piezoelectric resonator having improved temperature...

2005-12-23

2009-02-03

SanMartin, Jaydi (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S324000

Reexamination Certificate

active

07486006

ABSTRACT:
A piezoelectric resonator includes a piezoelectric layer having a first resonance frequency temperature coefficient of a first sign, a first and a second electrode, the piezoelectric layer being arranged between the first and second electrodes, and a compensation layer arranged between the first electrode and the piezoelectric layer, of a compensation material having a second resonance frequency temperature coefficient of a second sign opposite to the first one, wherein the compensation material is provided with a modification material to increase a conductivity of the compensation layer in a direction of the first electrode and the piezoelectric layer.

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Dubbois, Marc-Alexandre et al. “Properties of Aluminum Nitride thin Films for Piezoelectric Transducers and Microwave Filter Applications.”Applied Physics Letters. vol. 74, No. 20. American Institute of Physics: May 1999. pp. 3032-3034.

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