Method for producing carbon nanotubes

Details Method for producing carbon nanotubes Method for producing carbon nanotubes

2006-06-05

2009-10-06

Lorengo, Jerry (Department: 1793)

Chemistry of inorganic compounds

Carbon or compound thereof

Elemental carbon

C423S44500R, C423S447100, C423S447200, C977S742000, C977S750000, C977S752000

Reexamination Certificate

active

07597869

ABSTRACT:
An exemplary method for producing carbon nanotubes includes the following steps. First, a reaction chamber is provided. The reaction chamber defines a reaction region therein. Second, a substrate having a catalyst layer formed thereon is provided. Third, the substrate is disposed in the reaction chamber. Fourth, a carbon-containing reactive gas is introduced into the reaction chamber so as to grow carbon nanotubes using a chemical vapor deposition method. The substrate is moved along a direction opposite to a growth direction of the carbon nanotubes whilst growing the carbon nanotubes, whereby tips of the carbon nanotubes are kept in the reaction region while the substrate is moved.

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Westberg, H.; Borman, M. Free-standing silicon microstructures fabricated by laser chemical processing, J. Appl. Phys. 73 (11), Jun. 1, 1993.

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