Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2004-12-17
2009-11-17
Chowdhury, Tarifur (Department: 2886)
Optics: measuring and testing
By light interference
For dimensional measurement
C356S364000
Reexamination Certificate
active
07619747
ABSTRACT:
An analyzer plate positioned between a projection system and a radiation sensor is illuminated by a projected beam of radiation. The analyzer plate includes two crossing regions, each of which transmits radiation with a different polarization direction. The beam of projection radiation is patterned without influencing the polarization of the beam. By patterning the beam of projection radiation so that one region receives more radiation than the other region, the radiation sensor is given polarization selectivity.
REFERENCES:
patent: 5631731 (1997-05-01), Sogard
patent: 5673103 (1997-09-01), Inoue et al.
patent: 5689480 (1997-11-01), Kino
patent: 5841520 (1998-11-01), Taniguchi
patent: 7277182 (2007-10-01), Wegmann et al.
patent: 7286245 (2007-10-01), Wegmann et al.
patent: 2002/0070355 (2002-06-01), Ota
patent: 2002/0197541 (2002-12-01), Grobman et al.
patent: 2003/0227669 (2003-12-01), Volke et al.
patent: 2004/0048469 (2004-03-01), Wu et al.
patent: 2004/0114150 (2004-06-01), Wegmann et al.
patent: 2004/0137338 (2004-07-01), Inao et al.
patent: 2005/0007573 (2005-01-01), Hansen et al.
patent: 2005/0105180 (2005-05-01), Mackey
patent: 2005/0146693 (2005-07-01), Ohsaki
patent: 2005/1020687 (2005-09-01), Van Dijk et al.
patent: 1 124 163 (2001-08-01), None
patent: 1 467 253 (2004-10-01), None
patent: 6-124872 (1994-05-01), None
patent: 7-174517 (1995-07-01), None
patent: 9-504861 (1997-05-01), None
patent: 2003-121385 (2003-04-01), None
patent: 2004-0317137 (2004-02-01), None
patent: 2004-348050 (2004-12-01), None
patent: 2005-116733 (2005-04-01), None
European Search Report issued in EP Application No. 05 11 1692 dated Jan. 15, 2007.
Sengers Timotheus Franciscus
Van De Kerkhof Marcus Adrianus
ASML Netherlands B.V.
Chowdhury Tarifur
Hansen Jonathan M
Pillsbury Winthrop Shaw & Pittman LLP
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