Monitoring device for transport pods

Details Monitoring device for transport pods Monitoring device for transport pods

2005-07-11

2009-10-20

Pham, Toan N (Department: 2612)

Communications: electrical

Continuously variable indicating

Condition responsive

C414S217000, C257S414000, C073S865900

Reexamination Certificate

active

07605718

ABSTRACT:
A device that fits inside a transport pod communicating with the slots of the transport pod so that the device can be inserted and removed from the transport pod. The transport pods are for silicon wafers. The device has sensors that monitor the environment within the transport pod. Depending on the device's size, silicon wafers may be able to accompany the device so that the device can monitor the precise environment the silicon wafers are exposed to while inside the transport pod. The device may also be placed in a transport pod and run through the manufacturing process as one transport pod in a series. The results on the environmental monitoring can be used for alarms and monitoring or data logging to improve the yield of the silicon wafers.

REFERENCES:
patent: 6884639 (2005-04-01), Dougan et al.
patent: 2002/0124906 (2002-09-01), Suzuki et al.
patent: 2004/0267501 (2004-12-01), Freed et al.
patent: WO 98/59229 (1998-12-01), None

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