Microelectromechanical device with spacing layer

Details Microelectromechanical device with spacing layer Microelectromechanical device with spacing layer

2008-03-27

2009-11-03

Schwartz, Jordan M. (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S291000

Reexamination Certificate

active

07612933

ABSTRACT:
An interferometric modulating device is provided with a spacing layer positioned between the fixed reflector and the electrode. The spacing layer prevents shorting between the movable reflector and the electrode and provides a filtering cavity to improve color saturation.

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