Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate
2006-11-08
2009-10-20
Benson, Walter (Department: 2837)
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
C029S025350
Reexamination Certificate
active
07605524
ABSTRACT:
In order to provide a surface acoustic wave device provided with a pseudo-single crystal aluminum electrode film, having excellent power durability, easy to manufacture, and possible to grow with good reproducibility, a titanium buffer film4and an electrode film composed of an aluminum film or an aluminum alloy film are formed on a piezoelectric substrate2composed of lithium tantalate or lithium niobate. The electrode film5comprises a pseudo-single crystal film composed of two (111) domains. Each of the <111> directions of two (111) domains tilts in the range of 0 to 10 degrees to the substrate surface, and the <11-2> directions in the respective (111) domain planes are 1 to 15 degrees apart.
REFERENCES:
patent: 5558711 (1996-09-01), Sakurai
patent: 6316860 (2001-11-01), Kimura et al.
patent: 6407486 (2002-06-01), Kimura et al.
patent: 6657366 (2003-12-01), Watanabe et al.
patent: 6903488 (2005-06-01), Nakano et al.
patent: 2003/0006863 (2003-01-01), Inoue
patent: 2003/0132684 (2003-07-01), Nakagawara et al.
patent: 2005/0012435 (2005-01-01), Nakano et al.
patent: 2005/0057121 (2005-03-01), Nakagawara et al.
patent: 0 524 754 (1992-07-01), None
patent: 3-14308 (1991-01-01), None
patent: 3-48511 (1991-03-01), None
patent: 5-90268 (1993-04-01), None
patent: 5-183373 (1993-07-01), None
patent: 5-199062 (1993-08-01), None
patent: 6-006173 (1994-01-01), None
patent: 6-132777 (1994-05-01), None
patent: 7-135443 (1995-05-01), None
patent: 7-162255 (1995-06-01), None
patent: 7-170145 (1995-07-01), None
patent: 8-154030 (1996-06-01), None
patent: 8-204483 (1996-08-01), None
patent: 8-288782 (1996-11-01), None
patent: 9-135143 (1997-05-01), None
patent: 2001-94382 (2001-04-01), None
patent: 2002-135075 (2002-05-01), None
patent: 2002-368568 (2002-12-01), None
patent: 2003-101372 (2003-04-01), None
patent: 2003-188672 (2003-07-01), None
patent: 2003-258594 (2003-09-01), None
patent: 2005-39676 (2005-02-01), None
patent: WO-99/16168 (1999-04-01), None
patent: WO-00/74235 (2000-12-01), None
Epitaxially grown aluminum films with titanium intermediate layer onθrotatedY −XLiNbO3piezoelectric single crystal substrates.
High Power Durable SAW Filter with Epitaxial Aluminum Electrodes on 38.5 Rotated Y−X LiTaO3by Two-Step Process Sequence in Titanium Intermediate Layer.
Benson Walter
Jordan and Hamburg LLP
Nihon Dempa Kogyo Co. Ltd.
Rosenau Derek J
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