Photocopying – Projection printing and copying cameras – Step and repeat
Patent
1996-06-21
1999-06-15
Moses, Richard
Photocopying
Projection printing and copying cameras
Step and repeat
355 55, 355 67, G03B 2742, G03B 2752
Patent
active
059127252
ABSTRACT:
An exposure apparatus comprises a light source for supplying light with a predetermined wavelength and an illumination optical system for guiding the light from this light source onto a mask formed with a predetermined pattern. The illumination optical system includes a plurality of light-transmitting optical members which transmit therethrough the light from the light source, while at least one of the plurality of light-transmitting optical members is comprised of fluorite. Even when the mask is irradiated with exposure light for a long period, the optical members in the illumination optical system can be prevented from deteriorating, whereby a stable exposure operation can be realized over a long period.
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Moses Richard
Nikon Corporation
Virmani Shival
LandOfFree
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