Substrate processing apparatus, control method for the...

Details Substrate processing apparatus, control method for the... Substrate processing apparatus, control method for the...

2008-05-23

2009-12-29

Lindsay, Jr., Walter L (Department: 2812)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C156S345240, C156S345310, C414S935000, C438S014000, C118S712000

Reexamination Certificate

active

07640072

ABSTRACT:
A substrate processing apparatus, according to which inspection of various devices in the substrate processing apparatus can be carried out with improved reliability, while reducing the burden on a user. A processing chamber processes semiconductor wafers therein. A transfer chamber transfers the semiconductor wafers. A FOUP (front opening unified pod) houses a plurality of dummy wafers for inspection of the processing chamber or the transfer chamber. A CPU causes an HDD (hard disk drive) to store a housing state relating to the arrangement of the dummy wafers in the FOUP before replacement of dummy wafers in the FOUP and that after the replacement as dummy wafer setup information.

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patent: 2001-53131 (2001-02-01), None

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