Creating a jet impingement pattern for a thermal control system

Details Creating a jet impingement pattern for a thermal control system Creating a jet impingement pattern for a thermal control system

2007-10-15

2009-12-29

Nguyen, Ha Tran T (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

Reexamination Certificate

active

07639030

ABSTRACT:
In one embodiment, a head assembly to be adapted about a solid immersion lens includes a plurality of jets configured in a radial pattern that extends from a central portion to a substantial periphery of the head assembly. The jets may expel a liquid coolant stream to cool a semiconductor device with a radial impingement pattern so that the liquid coolant travels from a central portion of the semiconductor surface to a peripheral portion of the semiconductor surface. Other embodiments are described and claimed.

REFERENCES:
patent: 6836131 (2004-12-01), Cader et al.
patent: 7102374 (2006-09-01), Cader et al.
patent: 2006/0266497 (2006-11-01), Berger et al.
patent: 2007/0290702 (2007-12-01), Lee

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