Polishing machine, workpiece supporting table pad, polishing...

Details Polishing machine, workpiece supporting table pad, polishing... Polishing machine, workpiece supporting table pad, polishing...

2007-01-11

2009-08-11

Nguyen, Dung Van (Department: 3723)

Abrading

Abrading process

Abradant supplying

C451S444000, C451S059000

Reexamination Certificate

active

07572172

ABSTRACT:
A pedestal pad (workpiece supporting table pad) is arranged on the top of a pedestal (workpiece supporting table) for temporarily placing and holding a pre-polished or post-polished wafer (workpiece). This pedestal pad is formed of resin, and at least a surface of the pedestal pad which comes into contact with the wafer is non-absorbable to a fluid. The tissue of the pedestal pad is dense and smooth, and does not have any cavity, such as fine holes, which holds the fluid.

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