Method of adjusting process variables in a processing flow

Details Method of adjusting process variables in a processing flow Method of adjusting process variables in a processing flow

2007-09-24

2009-08-25

Von Buhr, Maria N. (Department: 2121)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S028000

Reexamination Certificate

active

07580768

ABSTRACT:
A method of adjusting process variables in a processing flow is disclosed. Processed samples are tested to determine sample parameters of the tested samples. The sample parameters are analyzed analyzing in relation to the process variables applied in the processing steps to determine the impact of the process variables on the sample parameters The process variables are modified in an attempt to change the sample parameters towards predetermined target values. And, the sequence of processing steps is repeated with the modified process variables. The analyzing step includes, for given samples, automated matching between patterns of process variables applied for the samples and corresponding sample data sets of parameters determined from the samples; quantifying the degree of match in terms of score values associated with patterns of process variables; and determining the significance of said score values in terms of significance values based on the deviation of the parameters in the sample data sets from said predetermined target values.

REFERENCES:
patent: 5408405 (1995-04-01), Mozumder et al.
patent: 5949678 (1999-09-01), Wold et al.
patent: 6549864 (2003-04-01), Potyrailo
patent: 6662061 (2003-12-01), Brown
patent: 6819963 (2004-11-01), Riley et al.
patent: 6912436 (2005-06-01), Jones et al.
patent: 6988017 (2006-01-01), Pasadyn et al.
patent: 7043403 (2006-05-01), Wang et al.
patent: 7082345 (2006-07-01), Shanmugasundram et al.
patent: 7174283 (2007-02-01), Berkooz et al.
patent: 7200459 (2007-04-01), Bode et al.
patent: 7225047 (2007-05-01), Al-Bayati et al.
patent: 7349753 (2008-03-01), Paik
patent: 7356377 (2008-04-01), Schwarm
patent: 7467023 (2008-12-01), Brown
patent: 7499897 (2009-03-01), Pinto et al.
patent: 2005/0234763 (2005-10-01), Pinto et al.

Affiliated with

Also associated with

Rating

Method of adjusting process variables in a processing flow does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of adjusting process variables in a processing flow, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of adjusting process variables in a processing flow will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4053679