Shielded probe apparatus for probing semiconductor wafer

Details Shielded probe apparatus for probing semiconductor wafer Shielded probe apparatus for probing semiconductor wafer

2007-07-18

2009-06-09

Nguyen, Ha Tran T (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

Reexamination Certificate

active

07545157

ABSTRACT:
A shielded probe apparatus is provided with a shielded probe and a tri-axial cable that are electrically connected within a shielded chassis. The shielded probe apparatus is capable of electrically testing a semiconductor device at a sub 100 fA operating current and an operating temperature up to 300 C.

REFERENCES:
patent: 3787768 (1974-01-01), Kubota et al.
patent: 3963986 (1976-06-01), Morton et al.
patent: 4480223 (1984-10-01), Aigo
patent: 4667523 (1987-05-01), Becker et al.
patent: 4731577 (1988-03-01), Logan
patent: 4845426 (1989-07-01), Nolan et al.
patent: 5003254 (1991-03-01), Hunt et al.
patent: 5015947 (1991-05-01), Chism
patent: 5150040 (1992-09-01), Byrnes et al.
patent: 5151653 (1992-09-01), Yutori et al.
patent: 5168218 (1992-12-01), Rich
patent: 5192907 (1993-03-01), Bonaria
patent: 5325052 (1994-06-01), Yamashita
patent: 5473254 (1995-12-01), Asar
patent: 5488292 (1996-01-01), Tsuta
patent: 5525911 (1996-06-01), Marumo et al.
patent: 5729150 (1998-03-01), Schwindt
patent: 5742174 (1998-04-01), Kister et al.
patent: 5949018 (1999-09-01), Esker
patent: 5952843 (1999-09-01), Vinh
patent: 6050829 (2000-04-01), Eldridge et al.
patent: 6075376 (2000-06-01), Schwindt
patent: 6124723 (2000-09-01), Costello
patent: 6137302 (2000-10-01), Schwindt
patent: 6201402 (2001-03-01), Root
patent: 6275051 (2001-08-01), Bachelder et al.
patent: 6276956 (2001-08-01), Cook
patent: 6586954 (2003-07-01), Root
patent: 6603322 (2003-08-01), Boll et al.
patent: 6727726 (2004-04-01), Plants
patent: 6860756 (2005-03-01), Chen
patent: 6992495 (2006-01-01), Root et al.
patent: 7259577 (2007-08-01), Root et al.
patent: 2001/0011902 (2001-08-01), Scwindt
patent: 0 177 809 (1986-04-01), None
patent: WO 99/04273 (1999-01-01), None

Affiliated with

Also associated with

Rating

Shielded probe apparatus for probing semiconductor wafer does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Shielded probe apparatus for probing semiconductor wafer, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Shielded probe apparatus for probing semiconductor wafer will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4052696