Semiconductor pressure sensor and method for manufacturing...

Measuring and testing – Fluid pressure gauge – Diaphragm

Reexamination Certificate

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C073S753000, C073S754000, C257S414000, C438S050000

Reexamination Certificate

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07624644

ABSTRACT:
A semiconductor pressure sensor includes a diaphragm; a resistor provided on a top surface of the diaphragm; an insulating film formed on the diaphragm and the resistor having a penetrating part exposing a top surface of the resistor; and a wiring pattern formed from the top surface of the resistor exposed by the penetrating part to a top surface of the insulating film; wherein a distance between a first crossing part where a plane orthogonal to the top surface of the diaphragm meets a top end of a side plane of the penetrating part and a second crossing part where the plane orthogonal to the top surface of the diaphragm meets a bottom of the side plane of the penetrating part is equal or greater than a thickness of the insulating film by a factor of a square root of two.

REFERENCES:
patent: 4314226 (1982-02-01), Oguro et al.
patent: 5335550 (1994-08-01), Satou
patent: 5932809 (1999-08-01), Sparks et al.
patent: 6876048 (2005-04-01), Fischer et al.
patent: 7404247 (2008-07-01), Eriksen et al.
patent: 7540198 (2009-06-01), Ichikawa
patent: 62124778 (1987-06-01), None
patent: 06-140640 (1994-05-01), None

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