Measuring and testing – Fluid pressure gauge – Diaphragm
Reexamination Certificate
2008-08-22
2009-12-01
Allen, Andre J (Department: 2855)
Measuring and testing
Fluid pressure gauge
Diaphragm
C073S753000, C073S754000, C257S414000, C438S050000
Reexamination Certificate
active
07624644
ABSTRACT:
A semiconductor pressure sensor includes a diaphragm; a resistor provided on a top surface of the diaphragm; an insulating film formed on the diaphragm and the resistor having a penetrating part exposing a top surface of the resistor; and a wiring pattern formed from the top surface of the resistor exposed by the penetrating part to a top surface of the insulating film; wherein a distance between a first crossing part where a plane orthogonal to the top surface of the diaphragm meets a top end of a side plane of the penetrating part and a second crossing part where the plane orthogonal to the top surface of the diaphragm meets a bottom of the side plane of the penetrating part is equal or greater than a thickness of the insulating film by a factor of a square root of two.
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Allen Andre J
IPUSA, PLLC
Jenkins Jermaine
Mitsumi Electric Co. Ltd.
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