Fishing – trapping – and vermin destroying
Patent
1994-01-13
1995-09-12
Hearn, Brian E.
Fishing, trapping, and vermin destroying
437231, 148DIG133, H01L 21302
Patent
active
054496446
ABSTRACT:
A new method of forming a contact opening by using a sacrificial spin-on-glass layer is described. A semiconductor substrate is provided wherein the surface of the substrate has an uneven topography. A glasseous layer is deposited over the uneven surface of the substrate and reflowed at low temperature whereby the glasseous layer will have a trench shaped surface over the planned contact opening area. The glasseous layer is covered with a spin-on-glass layer wherein the spin-on-glass planarizes the surface of the substrate. The spin-on-glass layer is baked and then covered with a uniform thickness layer of photoresist. The photoresist layer is exposed and developed to form the desired photoresist mask for the contact opening. The exposed spin-on-glass and glasseous layers are etched away to provide the contact opening to the semiconductor substrate. The photoresist layer is stripped and the sacrificial spin-on-glass layer is removed to complete the formation of the contact opening in the manufacture of the integrated circuit.
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Hong Gary
Huang Cheng H.
Pan Hong-Tsz
Yang Ming-Tzong
Gurley Lynne A.
Hearn Brian E.
Saile George O.
United Microelectronics Corporation
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