Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2007-06-08
2008-12-16
Kim, Peter B (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S030000, C355S072000
Reexamination Certificate
active
07466393
ABSTRACT:
An exposure apparatus which exposes a substrate to a pattern of an original via a projection optical system, with a gap between the projection optical system and the substrate being filled with liquid. The apparatus includes an ejection member configured to eject a gas through an ejection port outside the liquid, and a suction member configured to suck the gas through a suction portion outside the liquid. The suction port is arranged to be more distant than the ejection port from a center of an optical axis on a final surface of the projection optical system.
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Canon Kabushiki Kaisha
Fitzpatrick ,Cella, Harper & Scinto
Kim Peter B
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