Power plants – Motor operated by expansion and/or contraction of a unit of... – Mass is a solid
Reexamination Certificate
2005-01-18
2008-11-18
Nguyen, Hoang M (Department: 3748)
Power plants
Motor operated by expansion and/or contraction of a unit of...
Mass is a solid
C060S528000, C310S306000, C310S309000
Reexamination Certificate
active
07451596
ABSTRACT:
A micro electro-mechanical system (MEMS) positioner, including an actuator and method for making the same, includes a stage formed within a first layer of semiconductor material, along with a series of beams, flexure hinges and controlled input thermal actuators. The actuators are operatively engaged with a second layer, and are selectively actuatable to effect longitudinal expansion thereof, so that relative actuation between individual ones of actuators spaced in the planar direction relative to one another is configured to generate controlled movement of the stage within the planar direction, and relative actuation between individual ones of actuators spaced orthogonally to the planar direction relative to one another is configured to generate controlled movement of the stage out of the planar direction. The relative position between the stage and the support is adjustable in each of six degrees of freedom, so that the compliant mechanism forms a quasi-static precision manipulator.
REFERENCES:
patent: 2923555 (1960-02-01), Kost et al.
patent: 3648999 (1972-03-01), Bauer
patent: 4225264 (1980-09-01), Coone
patent: 4700932 (1987-10-01), Katsuno
patent: 4860864 (1989-08-01), Cwyeyshyn et al.
patent: 4954789 (1990-09-01), Sampsell
patent: 5083757 (1992-01-01), Barsky
patent: 5086901 (1992-02-01), Petronis et al.
patent: 5678944 (1997-10-01), Slocum et al.
patent: 5769554 (1998-06-01), Slocum
patent: 6069415 (2000-05-01), Little et al.
patent: 6193430 (2001-02-01), Culpepper
patent: 6275325 (2001-08-01), Sinclair
patent: 6366414 (2002-04-01), Aksyuk et al.
patent: 6647164 (2003-11-01), Weaver et al.
patent: 6679055 (2004-01-01), Ellis
patent: 6745567 (2004-06-01), Mercanzini
patent: 6746172 (2004-06-01), Culpepper
patent: 7046411 (2006-05-01), Fleming
U.S. Appl. No. 10/175,415, filed Jun. 19, 2002, Culpepper.
U.S. Appl. No. 09/293,442, filed Apr. 16, 1999, Culpepper.
Hale, “Principles and Techniques For Designing Preceision Machines” PhD. Thesis, MIT, Cambridge, MA pp. 183 and 184, 229-233, (1999).
Elmustafa et al., Flexural-Hinge Guided Motion Nanopositioner Stage For Precision Machining :Finite Element Simulations: Precision Engineering;Journal Of The International Societies For Precision Engineering And Nanotechnology, 2001, vol. 25, pp. 77-81.
Ryu et al., Optimal Design Of A Flexure Hinge Based XYO Wafer Stage; Precision Engineering, 1997, vol. 21, pp. 18-28.
Jokiel Jr., et al., Planar and Spatial Three-Degree-Of-Freedom Micro-Stages In Silicon MEMS, Proceedings of the 16th Annual ASPE Conference, Crystal City, VA, Nov. 2001(4 pages).
Dagalakis, et al., Kinematic Modeling And Analysis Of A Planar Micro-Positioner, Proceedings of the 16th Annual ASPE Conference, Crystal City, VA., Nov. 2001 (4 Pages).
Furutani, et al., Nanometer Cutting Machine Employing Parallel Mechanism, Proceedings of the 16th Annual ASPE Conference, Crystal City, VA., Nov. 2001 (4 Pages).
Dagalakis, et al., Kinematic Modeling Of A 6 Degree Of Freedom Tri-Stage Micro-Positioner, (4 pages), undated.
Que, et al., Bent-Beam Electro-Thermal Actuators For High Force Applications, pp. 31-36, IEEE 1999.
Culpepper, et al., Compliant Mechanisms For Micro-Scale Spatial Manipulators: Applications in Nanomanipulation, (4 Pgs,.
Brochure-M-850 Hexapod 6-Axis Parallel Kinematics Robot, 2002 Product Catalogue, Physik Instrument, pp. 1-3.
Brochure-F-206 Six Axis Parallel Kinematics Positioning System, 2002 Product Catalogue, Physik Instrument, pp. 1-5.
Chen Shih-Chi
Culpepper Martin L.
Massachusetts Institute of Technology
Nguyen Hoang M
Sampson & Associates P.C.
LandOfFree
Multiple degree of freedom micro electro-mechanical system... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Multiple degree of freedom micro electro-mechanical system..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Multiple degree of freedom micro electro-mechanical system... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4051257