Illumination systems, exposure apparatus, and...

Details Illumination systems, exposure apparatus, and... Illumination systems, exposure apparatus, and...

2005-11-16

2008-11-04

Nguyen, Hung Henry (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S053000

Reexamination Certificate

active

07446856

ABSTRACT:
Illumination systems are disclosed that illuminate a surface (M) for irradiation with illumination light emitted from a light source (5). An exemplary illumination system includes an incidence-side reflection-type fly-eye optical system (12) having multiple reflection-type partial optical systems arranged in rows, an emission-side reflection-type fly-eye optical system (14) having multiple reflection-type partial optical systems arranged in rows and corresponding to respective reflection-type partial optical systems of the incidence-side reflection-type fly-eye optical system (12), and a condensing optical system including two reflecting mirrors (18, 20) that guide illumination light, reflected by the emission-side reflection-type fly-eye optical system (14), to the surface (M). The center of curvature of at least one of the reflecting mirrors is optically eccentric with respect to a normal to the surface for irradiation at the center of the illuminated region.

REFERENCES:
patent: 6195201 (2001-02-01), Koch et al.
patent: 6452661 (2002-09-01), Komatsuda
patent: 6833904 (2004-12-01), Komatsuda
patent: 2003/0031017 (2003-02-01), Tsuji
patent: 2005/0213069 (2005-09-01), Murakami
patent: 2004/038773 (2004-06-01), None
patent: 2004/021086 (2004-11-01), None

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