Method and apparatus for reviewing defects by detecting...

Details Method and apparatus for reviewing defects by detecting... Method and apparatus for reviewing defects by detecting...

2007-02-09

2008-11-11

Nguyen, Ha (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S500000, C324S501000, C250S310000, C250S311000

Reexamination Certificate

active

07449898

ABSTRACT:
In a traditional method for automatically obtaining high-magnification images of defects by using an electron microscope for defect-reviewing of a semiconductor wafer, high-magnification images of a voltage contrast changing part are obtained in the case of defects generating voltage contrast change, this made difficult to observe defects themselves generating voltage contrast change. In the present invention, based on energy of secondary electron to be detected, after obtaining two types of images, namely an image making voltage contrast conspicuous easily, and an image not making it easily, and acquiring a shape change area adjacent to a voltage contrast change area based on this area as a defect location, a high-magnification image can automatically be obtained.

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patent: 2003-098114 (2003-04-01), None

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