Method for automatically setting the voltage resolution in parti

Details Method for automatically setting the voltage resolution in parti Method for automatically setting the voltage resolution in parti

Filed on

1985-02-27

Date issued

1987-08-11

Examiner

Eisenzopf, Reinhard J.

Patent Class

Electricity: measuring and testing

SubClass

Measuring, testing, or sensing electricity, per se

SubSubClass

With rotor

Other Related Categories

250311, 324 713, G01R 3100

Type

Patent

Status

active

Patent number

046864660

Description

ABSTRACT:
A method for setting voltage resolution in particle beam measuring devices wherein band width of a measured signal processing is modified. In order to set a desired voltage resolution simply, reliably, and with high precision, a signal noise of the measured signal is measured. This signal noise is compared to a desired value for the measured signal resolution, and the band width of the measured signal processing is modified such that the signal noise of the measured signal is less than or equal to the desired value for the measured signal resolution.

REFERENCES:
patent: 4220853 (1980-09-01), Feuerbaum et al.
patent: 4277679 (1981-07-01), Feuerbaum
patent: 4539477 (1985-09-01), Feuerbaum et al.
"VLSI Testing Using the Electron Probe", by Feuerbaum, Scanning Electron Microscopy", vol. 1, 1979, pp. 285-296.
"The Observation of Fast Voltage Waveforms in the SEM Using Sampling Techniques", by Thomas et al, IIT Research Inst., 4/76.
"Voltage Comparator System for Contactless Microcircuit Testing", IBM Tech. Disc. Bull., 3/75, vol. 17, #10, pp. 2871-2873.
"Voltage Contrast: A Review, by Gopinath et al, Scanning Electron Microscopy, vol. 1, 1978.
"Gigahertz Stroboscopy with the Scanning Electron Microscope", by Hosopawa et al, Review of Sci. Instrum., 9/78, vol. 49, #9.

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