Method for analyzing measurement data of device under test,...

Data processing: measuring – calibrating – or testing – Measurement system

Reexamination Certificate

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C700S121000, C702S120000

Reexamination Certificate

active

07472035

ABSTRACT:
An operation method for a semiconductor measurement apparatus having measuring, displaying, inputting, and storing devices, and a computing and controlling device connected to the other devices that performs computation and control. The method includes selecting, through the inputting device, a template for a semiconductor measurement-evaluation application displayed by the displaying device for individual technical fields; setting, through the inputting device, setting information required for execution with respect to the application templates displayed by the displaying device and of storing the setting information in the storing device; executing the application for which the setting information is stored; and storing an execution result obtained by executing the application for which the setting information is stored and execution-result attribute information into the storing device and of displaying the execution result and the execution-result attribute information on the displaying device.

REFERENCES:
patent: 5910895 (1999-06-01), Proskauer et al.
patent: 7043391 (2006-05-01), Miyazaki
patent: 7184923 (2007-02-01), Ishizuka

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