Method for producing a semiconductor integrated circuit having a

Fishing – trapping – and vermin destroying

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437 67, 437 78, H01L 2131

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048371785

ABSTRACT:
A compound semiconductor (e.g., GaAs) IC device structure includes: a compound semiconductor substrate having a semi-insulating compound surface region; an active element laminated layer formed on the surface region; an isolation region of a semi-insulating (intrinsic) compound semiconductor which is filled in a groove extending into the surface region through the laminated layer; and active elements formed in regions of the laminated layer, isolated by the filled groove.

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patent: 4649411 (1987-03-01), Birrittella
Blum et al., IBM Tech. Disc. Bull., vol. 13, No. 9 (Feb. 1971), p. 2494.

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