Lithographic apparatus and device manufacturing method

Details Lithographic apparatus and device manufacturing method Lithographic apparatus and device manufacturing method

2006-02-07

2008-11-04

Rutledge, Della J. (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S072000, C355S077000

Reexamination Certificate

active

07446854

ABSTRACT:
A lithographic apparatus includes a first control system to control a first physical quantity in the lithographic apparatus. A parameter in the first control system is dependent on a value of a further physical quantity in the lithographic apparatus. The parameter may be included in a feedforward path. An input of the feedforward path may be connected to a second control system, the second control system to control a second physical quantity in the lithographic apparatus. The feedforward path may provide a feedforward signal to the first control system in dependency on a signal in the second control system. The further physical quantity may include the second physical quantity.

REFERENCES:
patent: 5663783 (1997-09-01), Ueda
patent: 2005/0140326 (2005-06-01), Houkes et al.
patent: 2006/0238739 (2006-10-01), Butler

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