Data processing: measuring – calibrating – or testing – Measurement system – Dimensional determination
Reexamination Certificate
2004-10-26
2008-12-02
Cosimano, Edward (Department: 2863)
Data processing: measuring, calibrating, or testing
Measurement system
Dimensional determination
C702S040000
Reexamination Certificate
active
07460981
ABSTRACT:
Methods and systems for monitoring semiconductor fabrication processes are provided. A system may include a stage configured to support a specimen and coupled to a measurement device. The measurement device may include an illumination system and a detection system. The illumination system and the detection system may be configured such that the system may be configured to determine multiple properties of the specimen. For example, the system may be configured to determine multiple properties of a specimen including, but not limited to, a presence of macro and micro defects. In this manner, a measurement device may perform multiple optical and/or non-optical metrology and/or inspection techniques.
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Brown Kyle A.
Bultman Gary
Fielden John
Levy Ady
Nikoonahad Mehrdad
Baker & McKenzie LLP
Cosimano Edward
KLA-Tencor Technologies Corp.
Washburn Douglas N
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