Semiconductor device manufacturing: process – With measuring or testing
Reexamination Certificate
2004-04-28
2008-11-11
Geyer, Scott B. (Department: 2812)
Semiconductor device manufacturing: process
With measuring or testing
C438S016000, C438S017000, C118S698000, C118S712000, C257SE21521
Reexamination Certificate
active
07449349
ABSTRACT:
A coating and developing apparatus having a plurality of cassettes includes at least a step of acquiring, for each of all wafers retained in the cassettes, wafer attribute information associated with a cassette retaining that wafer and a process recipe, a step of acquiring inside-cassette information associated with the retained wafer, a step of acquiring information on a process recipe in an exposure apparatus directly from the exposure apparatus, and a step of determining a processing order for the plurality of wafers based on the attribute information, the inside-cassette information, process recipe information of the coating and developing apparatus which the coating and developing apparatus has, and the process recipe information of the exposure apparatus acquired from the exposure apparatus.
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Miyata Akira
Wada Shigeki
Geyer Scott B.
Nikmanesh Seahvosh J
Oblon & Spivak, McClelland, Maier & Neustadt P.C.
Tokyo Electron Limited
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