Processing schedule creating method, coating and developing...

Semiconductor device manufacturing: process – With measuring or testing

Reexamination Certificate

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Details

Other Related Categories

C438S016000, C438S017000, C118S698000, C118S712000, C257SE21521

Type

Reexamination Certificate

Status

active

Patent number

07449349

Description

ABSTRACT:
A coating and developing apparatus having a plurality of cassettes includes at least a step of acquiring, for each of all wafers retained in the cassettes, wafer attribute information associated with a cassette retaining that wafer and a process recipe, a step of acquiring inside-cassette information associated with the retained wafer, a step of acquiring information on a process recipe in an exposure apparatus directly from the exposure apparatus, and a step of determining a processing order for the plurality of wafers based on the attribute information, the inside-cassette information, process recipe information of the coating and developing apparatus which the coating and developing apparatus has, and the process recipe information of the exposure apparatus acquired from the exposure apparatus.

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patent: 2002-100549 (2002-04-01), None

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