Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2004-06-25
2008-12-30
Mathews, Alan A (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S072000, C355S077000
Reexamination Certificate
active
07471373
ABSTRACT:
A lithographic apparatus is disclosed. The apparatus includes a radiation system for supplying a beam of radiation, and a support structure for supporting a patterning device. The patterning device serves to pattern the beam of radiation according to a desired pattern. The apparatus also includes a projection system for projecting the patterned beam of radiation onto a target portion of a substrate, and an assembly for determining a spatial position of the patterning device relative to the projection system. The assembly includes a measuring unit that has a plurality of sensors that are mounted on the projection system.
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Bartray Petrus Rutgerus
Box Wilhelmus Josephus
Engels Marc Johannes Martinus
Franken Dominicus Jacobus Petrus Adrianus
Luttikhuis Bernardus Antonius Johannes
ASML Netherlands B.V.
Mathews Alan A
Sterne Kessler Goldstein & Fox P.L.L.C.
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