Apparatus for applying high frequency ultrasonic energy to clean

Details Apparatus for applying high frequency ultrasonic energy to clean Apparatus for applying high frequency ultrasonic energy to clean

1986-11-06

1987-08-11

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310323, 310334, 366127, 134 1, H01L 4108

Patent

active

046864067

ABSTRACT:
An improved apparatus for coupling ultrasonic energy from piezoelectric transducers to a liquid medium for use in cleaning or etching processes. The apparatus includes a vibration coupling plate which may be partially immersed in the liquid medium, while the upper, nonimmersed end of the plate is configured to support a pair of piezoelectric transducers disposed at 45 degree angles with respect to the lengthwise axis of the plate. The beams of ultrasonic mechanical wave energy are therefore reflected back and forth from the side edges of the plate and dispersed over a wider angle in the liquid.

REFERENCES:
patent: 3198489 (1965-08-01), Finch
patent: 3240963 (1966-03-01), Sasaki
patent: 4401131 (1983-08-01), Lawson
patent: 4537511 (1985-08-01), Frei
patent: 4602184 (1986-07-01), Meitzler

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