Positioning apparatus, exposure apparatus and method of manufact

Details Positioning apparatus, exposure apparatus and method of manufact Positioning apparatus, exposure apparatus and method of manufact

1997-09-30

1999-05-25

Mathews, Alan A.

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

355 53, 356400, 2504431, G03B 2752

Patent

active

059073900

ABSTRACT:
Positioning accuracy of a scanning stage is improved as a result of reducing error by reducing a non-uniformity in the temperature of air on an optical path of length measurement of the stage. An apparatus for measuring the position of a reticle stage and adjusting the position of the stage based upon the results of measurement includes a reflecting mirror secured to the stage, an interferometer for measuring the distance between a reference position and the reflecting mirror using light, and an air conditioner for supplying a temperature-regulated air stream to an optical path of length measurement connecting the reference position and the reflecting mirror, the air stream being supplied at a speed higher than the speed at which the stage is scanned.

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