Surface acoustic wave device

Details Surface acoustic wave device Surface acoustic wave device

2006-06-23

2008-11-04

SanMartin, J. (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

Reexamination Certificate

active

07446452

ABSTRACT:
An exemplary surface acoustic wave device includes a DLC film, a zinc oxide film formed on the DLC film, and at least one interdigital transducer formed on the zinc oxide film. The DLC film has a nano-sized thickness Z(f), corresponding to the surface acoustic wave device having an operational frequency f ranging from 20 to 1,000 GHz, satisfying the condition (1): Z(f)=M×Z0/(f/f0), and Z(f)≧1 nanometer. The zinc oxide film has a nano-sized thickness Y(f), corresponding to the surface acoustic wave device having the operational frequency f, satisfying the condition (2): Y(f)=N×Y0/(f/f0). The Z0and Y0respectively are the thicknesses of the DLC film and the zinc oxide film corresponding to an operational frequency f0of the surface acoustic wave device.

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patent: 2003/0137217 (2003-07-01), Ishibashi et al.
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