Coating apparatus – Gas or vapor deposition – Running length work
Reexamination Certificate
2002-11-21
2008-12-09
Chen, Bret (Department: 1792)
Coating apparatus
Gas or vapor deposition
Running length work
C118S720000, C118S729000
Reexamination Certificate
active
07462244
ABSTRACT:
A vacuum deposition apparatus is used for deposit evaporated substance from evaporation sources (6aand6b) on the desired position of a flexible substrate (1). While the flexible substrate (1) is carried using rollers in a vacuum, shutters (8aand8b) are opened and closed to control the movement of the evaporated substance via openings. A film having a desired shape of pattern is formed on the flexible substrate (1) with higher controllability.
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Bannai Yutaka
Miura Tamaki
Miyachi Mariko
Mori Mitsuhiro
Utsugi Koji
Chen Bret
NEC Corporation
Young & Thompson
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