Semiconductor device and method of fabricating the same

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material

Reexamination Certificate

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C257SE21001, C438S285000

Reexamination Certificate

active

07456087

ABSTRACT:
A semiconductor device is provided. The semiconductor device comprises a substrate, a gate structure, a spacer, a first poly-SiGe layer being boron-doped and a second poly-SiGe layer being boron-doped. The substrate has two openings and the gate structure is disposed on the substrate between the openings. The spacer is disposed on the sidewalls of the gate structure and above a portion of the openings. The first poly-SiGe layer is disposed on the surface of the openings in the substrate. The second poly-SiGe layer is disposed on the first poly-SiGe layer, and the top of the second poly-SiGe layer is higher than the surface of the substrate. Moreover, the boron concentration in the first poly-SiGe layer is lower than that in the second poly-SiGe layer.

REFERENCES:
patent: 6599803 (2003-07-01), Weon et al.
patent: 6995054 (2006-02-01), Oda et al.
patent: 7172933 (2007-02-01), Huang et al.
patent: 7176481 (2007-02-01), Chen et al.
patent: 7364957 (2008-04-01), Thei et al.
patent: 2005/0148148 (2005-07-01), Cheng

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