Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2005-10-12
2008-11-25
Nguyen, Hung Henry (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S030000
Reexamination Certificate
active
07456929
ABSTRACT:
An exposure apparatus which prevents damages due to leaked out liquid from expanding and can maintain exposure accuracy and measuring accuracy. The exposure apparatus includes first and second stages (ST1, ST2) which can independently move within an XY-plane on an image plane side of a projection optical system (PL); a drive mechanism (SD) which moves the first stage and the second stage together with the stage being close to or in contact with each other; a liquid immersion mechanism (1) which forms a liquid immersion area on an upper plane of at least one of the stages of the first stage and the second stage; and a detecting device (60) which detects liquid leaked out from between the first stage and the second stage.
REFERENCES:
patent: 4346164 (1982-08-01), Tabarelli et al.
patent: 4480910 (1984-11-01), Takanashi et al.
patent: 5610683 (1997-03-01), Takahashi
patent: 5715039 (1998-02-01), Fukuda et al.
patent: 5825043 (1998-10-01), Suwa
patent: 5969441 (1999-10-01), Loopstra et al.
patent: 6208407 (2001-03-01), Loopstra
patent: 6262796 (2001-07-01), Loopstra et al.
patent: 6341007 (2002-01-01), Nishi et al.
patent: 6778257 (2004-08-01), Bleeker et al.
patent: 6897963 (2005-05-01), Taniguchi et al.
patent: 7321419 (2008-01-01), Ebihara
patent: 2004/0165159 (2004-08-01), Lof et al.
patent: 2004/0263809 (2004-12-01), Nakano
patent: 2005/0094125 (2005-05-01), Arai
patent: 2006/0007419 (2006-01-01), Streefkerk et al.
patent: 2006/0082741 (2006-04-01), Van Der Toorn et al.
patent: 2006/0132737 (2006-06-01), Magome et al.
patent: 2006/0132740 (2006-06-01), Ebihara
patent: 2006/0227308 (2006-10-01), Brink et al.
patent: 221 563 (1985-04-01), None
patent: 224 448 (1985-07-01), None
patent: 1 713 113 (2006-10-01), None
patent: 1 713 114 (2006-10-01), None
patent: A 57-117238 (1982-07-01), None
patent: A 58-202448 (1983-11-01), None
patent: A 59-019912 (1984-02-01), None
patent: A 62-65326 (1987-03-01), None
patent: A 63-157419 (1988-06-01), None
patent: A 4-65603 (1992-03-01), None
patent: A 4-305915 (1992-10-01), None
patent: A 4-305917 (1992-10-01), None
patent: A 5-21314 (1993-01-01), None
patent: A 5-62877 (1993-03-01), None
patent: A 6-124873 (1994-05-01), None
patent: A 7-176468 (1995-07-01), None
patent: A 7-220990 (1995-08-01), None
patent: A 8-37149 (1996-02-01), None
patent: A 8-316125 (1996-11-01), None
patent: A 10-163099 (1998-06-01), None
patent: A 10-214783 (1998-08-01), None
patent: A 10-303114 (1998-11-01), None
patent: A 10-340846 (1998-12-01), None
patent: A 11-16816 (1999-01-01), None
patent: A 11-176727 (1999-07-01), None
patent: A 2000-58436 (2000-02-01), None
patent: A 2000-505958 (2000-05-01), None
patent: A 2001-267239 (2001-09-01), None
patent: A 2002-14005 (2002-01-01), None
patent: A 2005-236087 (2005-09-01), None
patent: A 2005-259789 (2005-09-01), None
patent: A 2005-268700 (2005-09-01), None
patent: A 2005-268742 (2005-09-01), None
patent: WO 99/49504 (1999-09-01), None
patent: WO 01/035168 (2001-05-01), None
patent: WO 2004/019128 (2004-03-01), None
patent: WO 2004/090577 (2004-10-01), None
patent: WO 2004/114380 (2004-12-01), None
patent: WO 2005/010962 (2005-02-01), None
patent: WO 2005/074014 (2005-08-01), None
patent: WO 2005/076321 (2005-08-01), None
Nguyen Hung Henry
Nikon Corporation
Oliff & Berridg,e PLC
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