Plasma generating apparatus

Details Plasma generating apparatus Plasma generating apparatus

2008-03-06

2008-11-25

Owens, Douglas W. (Department: 2821)

Coating apparatus

Gas or vapor deposition

With treating means

C118S712000, C156S345280, C315S111210

Reexamination Certificate

active

07455030

ABSTRACT:
A plasma generating apparatus is provided with a plasma generating apparatus for ionizing gas by high frequency discharge within a plasma generating container to thereby generate a plasma and for discharging the plasma to the outside through a plasma discharge hole, an antenna disposed within the plasma generating container for radiating a high frequency wave, an antenna cover made of an insulator and covering a whole of the antenna, a DC voltage measuring device for measuring a DC voltage between the antenna and the plasma generating container, and a comparator for comparing the DC voltage with a reference value, and outputting an alarm signal when an absolute value of the DC voltage value is larger than the absolute value of the reference value.

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