Dimensional calibration standards

Details Dimensional calibration standards Dimensional calibration standards

2007-11-27

2008-11-18

Toatley, Jr., Gregory J (Department: 2877)

Optics: measuring and testing

By monitoring of webs or thread

For flaws or imperfections

C356S243100

Reexamination Certificate

active

07453571

ABSTRACT:
A calibration standard, for calibrating lateral or angular dimensional measurement systems, is provided. The standard may include a first substrate spaced from a second substrate. The standard may be cross-sectioned in a direction substantially perpendicular or substantially non-perpendicular to an upper surface of the first substrate. The cross-sectioned portion of the standard may form a viewing surface of the calibration standard. The standard may include at least one layer disposed between the first and second substrates. The layer, or a feature etched into the first or second substrate or a feature etched into the layer may have a traceably measured thickness or may be oriented at a traceably measured angle with respect to the viewing surface. A thickness or angle of the layer or other feature may be traceably measured using any technique for calibrating a measurement system with a standard reference material traceable to a national testing authority.

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