Piezoelectric actuator, method for producing piezoelectric...

Details Piezoelectric actuator, method for producing piezoelectric... Piezoelectric actuator, method for producing piezoelectric...

2005-11-01

2008-12-16

San Martin, Jaydi A (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S312000

Reexamination Certificate

active

07466067

ABSTRACT:
Thickness of a piezoelectric layer31is measured and widths of individual electrodes32are determined based on an amount of deviation of the measured thickness of the piezoelectric layer31from a predetermined reference thickness set in advance for the piezoelectric layer31. Individual electrodes32of the determined widths are then formed on a side opposite to pressure chambers14of the piezoelectric layer31. It is therefore possible to easily compensate for fluctuation in the thickness of the piezoelectric layer31with the widths of individual electrodes32. As a result, it is possible to provide a piezoelectric actuator for liquid transporting apparatus, and a method for manufacturing a piezoelectric actuator or the like which is capable of compensating for the fluctuation in thickness of the piezoelectric layer with electrode width.

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