Measuring and testing – Fluid pressure gauge – Electrical
Reexamination Certificate
2007-07-23
2008-11-18
Allen, Andre J (Department: 2855)
Measuring and testing
Fluid pressure gauge
Electrical
C073S715000
Reexamination Certificate
active
07451656
ABSTRACT:
The method for promoting the size reduction, the performance improvement and the reliability improvement of a semiconductor device embedded with pressure sensor is provided. In a semiconductor device embedded with pressure sensor, a part of an uppermost wiring is used as a lower electrode of a pressure detecting unit. A part of a silicon oxide film formed on the lower electrode is a cavity. On a tungsten silicide film formed on the silicon oxide film, a silicon nitride film is formed. The silicon nitride film has a function to fill a hole or holes and suppress immersion of moisture from outside to the semiconductor device embedded with pressure sensor. A laminated film of the silicon nitride film and the tungsten silicide film forms a diaphragm of the pressure sensor.
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Goto Yasushi
Machida Shuntaro
Yokoyama Natsuki
A. Marquez, Esq. Juan Carlos
Allen Andre J
Fisher Esq. Stanley P.
Hitachi , Ltd.
Jenkins Jermaine
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