Piezoelectric element, piezoelectric actuator, and ink jet...

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices

Reexamination Certificate

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C310S328000, C310S358000

Reexamination Certificate

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07456548

ABSTRACT:
A piezoelectric element having a piezoelectric film and one pair of electrodes being in contact with the piezoelectric film on a substrate, wherein the piezoelectric film has a structure in which a lead-containing piezoelectric film and a lead-free piezoelectric film are laminated, and in the piezoelectric film, a layer furthest from the substrate and a layer closest to the substrate are lead-free piezoelectric films.

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Vasant Kumar, et al., “Lead Zirconate Titanate Films by Rapid Thermal Processing”,Applied Physics Letters58(11), Mar. 18, 1991, pp. 1161-1163.

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